As/Sb-MBE system


The As/Sb -MBE is designed for providing (In, Ga, Al) / (As, Sb) semiconductor wafer epitaxy services

·In, Ga, Al SUMO cells for group III
·Valved crackers for As and Sb cells
·Si, Te and Be cells for doping
·Up to 3″ diameter wafer holder
·Growth control — MOLLY
·200 RGA
·Optical pyrometer (440ºC – 800°C)
·RHEED for real time in-situmonitoring and KSA400 software for image/video capture for surface ·analysis

As:Sb-MBE system